Self-Compensation of PZT Errors in White Light Scanning Interferometry
نویسندگان
چکیده
منابع مشابه
Fringe modulation skewing effect in white-light vertical scanning interferometry.
An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain t...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of Korea
سال: 1999
ISSN: 1226-4776
DOI: 10.3807/josk.1999.3.2.035